Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Dual-sided substrate measurement apparatus and methods

Dual-sided substrate measurement apparatus and methods

US Patent 7528937 · Granted May 5, 2009

Estimated economic value: $3,604,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Scanning methods for focus control for lithographic processing of reconstituted 2019
Wynne-Dyson projection lens with reduced susceptibility to UV damage2016
Substrate-alignment using detector of substrate material2013
Substrate-alignment using detector of substrate material2013
Sub-field enhanced global alignment2012
Dual-sided substrate measurement apparatus and methods2011
Dual-sided substrate measurement apparatus and methods2011
Dual-sided substrate measurement apparatus and methods2011
Dual-sided substrate measurement apparatus and methods2011
Dual-sided substrate measurement apparatus and methods2011
Dual-sided substrate measurement apparatus and methods2011
Dual-sided substrate measurement apparatus and methods2011