Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Layered-filament lattice for chemical mechanical polishing

Layered-filament lattice for chemical mechanical polishing

US Patent 7517277 · Granted Apr 14, 2009

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Chemical mechanical polishing method2012
High-rate groove pattern2011
High-rate polishing method2011
Interconnected-multi-element-lattice polishing pad2010
Chemical mechanical polishing pad having secondary polishing medium capacity con2010
Three-dimensional network for chemical mechanical polishing2010
Interpenetrating network for chemical mechanical polishing2009
Interpenetrating network for chemical mechanical polishing2009
Three-dimensional network for chemical mechanical polishing2009
Chemical mechanical polishing pad with controlled wetting2009
Polishing pad with grooves to reduce slurry consumption2009
Polishing pad with grooves to reduce slurry consumption2009