Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Beam line architecture for ion implanter

Beam line architecture for ion implanter

US Patent 7507978 · Granted Mar 24, 2009

Estimated economic value: $732,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Power coupling device2025
Scanning systems with dynamically adjustable shielding systems and related metho2023
Power coupling device2023
Wheel and lift unit for radiation imaging modalities2022
System and method for sampling frequency adjustment for radiation imaging system2022
Scanning magnet design with enhanced efficiency2021
Scan and corrector magnet designs for high throughput scanned beam ion implanter2021
Scanning systems with dynamically adjustable shielding systems and related metho2021
Multiple three-dimensional (3-D) inspection renderings2020
Tetrode extraction apparatus for ion source2020
Scan and corrector magnet designs for high throughput scanned beam ion implanter2020
Beam profiling speed enhancement for scanned beam implanters2019