Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Correcting 3D effects in phase shifting masks using sub-resolution features

Correcting 3D effects in phase shifting masks using sub-resolution features

US Patent 7503030 · Granted Mar 10, 2009

Estimated economic value: $10,174,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Robot having a changeable character2022
Robot having a changeable character2020
Robotic activity system using color patterns2018
Robotic activity system using color patterns2017
Robotic activity system using position sensing2016
Method and system for semiconductor design hierarchy analysis and transformation2015
Correcting 3D effects in phase shifting masks using sub-resolution features2011
Correcting 3D effects in phase shifting masks using sub-resolution features2011
Method and system for semiconductor design hierarchy analysis and transformation2010
Layout printability optimization method and system2009
System for designing integrated circuits with enhanced manufacturability2009
Laser spectral engineering for lithographic process2008