Advanced low dielectric constant organosilicon plasma chemical vapor deposition films

Assignee

• IBM
• Sony
• Sony

Inventors

• Son V. Nguyen (274 patents)
• Sarah L. Lane (8 patents)
• Jia Lee (17 patents)
• Kensaku Ida (5 patents)
• Darryl D. Restaino (36 patents)
• Takeshi Nogami (199 patents)

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