Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Exposure apparatus, method applied to the apparatus, and device manufacturing method

Exposure apparatus, method applied to the apparatus, and device manufacturing method

US Patent 7486379 · Granted Feb 3, 2009

Estimated economic value: $599,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Water and method for storing silicon wafer2012
Method of manufacturing semiconductor device2001
Semiconductor device and method of manufacturing the same2001
Automobile tire1998
Semiconductor device with first and second wells which have opposite conductivit1998
Semiconductor device having an electrical connection between a control electrode1998
FM communication device with avoidance of interference by substantially same cha1989
Control circuit for generating a step-type control signal and a continuously var1980