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Home › Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies

Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies

US Patent 7479206 · Granted Jan 20, 2009

Estimated economic value: $3,797,000 ⓘ

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