Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for reducing dielectric charging in MEMS structures

Method and apparatus for reducing dielectric charging in MEMS structures

US Patent 7474171 · Granted Jan 6, 2009

Estimated economic value: $29,804,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for manufacturing a high-capacitance RF MEMS switch2016
Switchable capacitor2016
Integrated capacitively-coupled bias circuit for RF MEMS switches2016
Hermetic packaging of integrated circuit components having a capacitor for trans2015
Hermetic packaging of integrated circuit components2014
RF micro-electro-mechanical system (MEMS) capacitive switch2014
Method for fabricating electrical circuitry on ultra-thin plastic films2013
Systems and methods for providing high-capacitance RF MEMS switches2013
Hermetic packaging of integrated circuit components2013
Method for fabricating electrical circuitry on ultra-thin plastic films2012
Thin micropolarizing filter, and a method for making it2010
Method and system of local oscillator signal generation2008