Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Silicon mirrors having reduced hinge stress from temperature variations

Silicon mirrors having reduced hinge stress from temperature variations

US Patent 7468826 · Granted Dec 23, 2008

Estimated economic value: $21,744,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of manufacturing a micro-electromechanical system (MEMS) device2013
Mirror assembly with recessed mirror2012
Bracket for piezoelectric drive torsional hinge mirror2009
Shock resistant and mode mixing resistant torsional hinged device2008
Manufacturing a mirror plate or other operational structure having superior flat2008
Single piece torsional hinged device with central spines and perimeter ridges to2008
Torsional hinged device with improved coupling between a magnet mounted to said 2008
Low cost torsional hinge mirror package with non-rotating magnetic drive2008
Two axis low inertia torsional hinged optical device2007
Multilayer torsional hinged mirror with a recessed drive/sensing permanent magne2007
Resonant oscillating device actuator structure2007
Structure and method for reducing thermal stresses on a torsional hinged device2007