Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sloped cantilever beam electrode for a MEMS device

Sloped cantilever beam electrode for a MEMS device

US Patent 7466476 · Granted Dec 16, 2008

Estimated economic value: $9,333,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for forming a mirror MEMS device2013
Hinge design for enhanced optical performance for a digital micro-mirror device2011
Sloped cantilever beam electrode for a MEMS device2010
Electrostatic fins for a MEMS device2008
Hinge design for enhanced optical performance for a micro-mirror device2007
Split beam micromirror2006
Bias voltage routing scheme for a digital micro-mirror device2006