Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Safety mechanism for a lithographic patterning device

Safety mechanism for a lithographic patterning device

US Patent 7466397 · Granted Dec 16, 2008

Estimated economic value: $4,882,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Object holder, electrostatic sheet and method for making an electrostatic sheet2025
Object holder, tool and method of manufacturing an object holder2025
Supply system for an extreme ultraviolet light source2021
Droplet generator for lithographic apparatus, EUV source and lithographic appara2020
Supply system for an extreme ultraviolet light source2019
Droplet generator for lithographic apparatus, EUV source and lithographic appara2019
Lithographic apparatus comprising an actuator, and method for protecting such ac2018
Substrate table system, lithographic apparatus and substrate table swapping meth2017
Stage system and a lithographic apparatus2017
Lithographic apparatus, method of deforming a substrate table and device manufac2016
Lithographic apparatus and device manufacturing method2015
Mask transport system configured to transport a mask into and out of a lithograp2012