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Home › Ferroelectric and high dielectric constant integrated circuit capacitors with three-dimensional orientation for high-density memories, and method of making the same

Ferroelectric and high dielectric constant integrated circuit capacitors with three-dimensional orientation for high-density memories, and method of making the same

US Patent 7459318 · Granted Dec 2, 2008

Estimated economic value: $253,000 ⓘ

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