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Home › Method and system for detecting tilt or shift of wafer transferred onto hot plate in real time, and method system for monitoring baking process of wafers in real time

Method and system for detecting tilt or shift of wafer transferred onto hot plate in real time, and method system for monitoring baking process of wafers in real time

US Patent 7454307 · Granted Nov 18, 2008

Estimated economic value: $4,217,000 ⓘ

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