Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and system for operating an air gauge at programmable or constant standoff

Method and system for operating an air gauge at programmable or constant standoff

US Patent 7437911 · Granted Oct 21, 2008

Estimated economic value: $3,006,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reticle cooling by non-uniform gas flow2019
Patterning device support, lithographic apparatus, and method of controlling pat2018
Patterning device support, lithographic apparatus, and method of controlling pat2017
Patterning device support, lithographic apparatus, and method of controlling pat2017
Reticle cooling system in a lithographic apparatus2017
Fluid gauge proximity sensor and method of operating same using a modulated flui2011
Method and system for operating an air gauge at programmable or constant standof2010
Method and system for operating an air gauge at programmable or constant standof2010
Alignment system and method2009
Method and system for improved trajectory planning and execution2008
Levitated reticle-masking blade stage2008
Lithographic apparatus and device manufacturing method utilizing a metrology sys2008