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Home › Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained

Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained

US Patent 7399652 · Granted Jul 15, 2008

Estimated economic value: $10,148,000 ⓘ

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