Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and method for mid-pressure dense phase gas and ultrasonic cleaning

System and method for mid-pressure dense phase gas and ultrasonic cleaning

US Patent 7361231 · Granted Apr 22, 2008

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Load lock system for supercritical fluid cleaning2007
Load lock system for supercritical fluid cleaning2007
Method of making barrier layers2006
Automated dense phase fluid cleaning system2005
Automated dense phase fluid cleaning system2005
Reactive aqueous metal oxide sols as polishing slurries for low dielectric const2004
Method of and apparatus for substrate pre-treatment2004
Method of making electronic materials2003
Reactive aqueous metal oxide sols as polishing slurries for low dielectric const2002
Selective fluorocarbon-based RIE process utilizing a nitrogen additive1994
Process for forming refractory metal layers on ceramic substrate1982