Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method

Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method

US Patent 7326948 · Granted Feb 5, 2008

Estimated economic value: $3,001,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Actuation mechanism, optical apparatus, lithography apparatus and method of manu2017
Lithographic apparatus and method2013
Pulse modifier, lithographic apparatus and device manufacturing method2011
Electromagnetic radiation pulse duration control apparatus and method2010
Lithographic apparatus, beam delivery systems, prisms and device manufacturing m2009
Pulse modifier, lithographic apparatus, and device manufacturing method2008
Lithographic apparatus and device manufacturing method2008
Lithographic apparatus and device manufacturing method2008
Lithographic apparatus and device manufacturing method2008
Lithographic apparatus, illumination system, and optical element for rotating an2007
Lithographic apparatus and device manufacturing method2006
Lithographic apparatus, mirror element, device manufacturing method, and beam de2006