Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Secondary latchkey mechanism and method for reticle SMIF pods

Secondary latchkey mechanism and method for reticle SMIF pods

US Patent 7325685 · Granted Feb 5, 2008

Estimated economic value: $10,462,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pod swapping internal to tool run time2012
Semiconductor automation buffer storage identification system and method2011
Overhead traveling vehicle testing and calibration2011
Overhead traveling vehicle testing and calibration2011
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate2011
Method, system, and storage medium for providing continuous communication betwee2010
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate2009
Method, system, and storage medium for providing continuous communication betwee2008
Overhead traveling vehicle testing and calibration2008
Overhead traveling vehicle testing and calibration2008
Hoisting apparatus2007
Test fixture for evaluating RF identification system and related methods2006