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Home › Dry-etching gas for semiconductor process and preparation method thereof

Dry-etching gas for semiconductor process and preparation method thereof

US Patent 7319174 · Granted Jan 15, 2008

Assignee

Ulsan Chemical Co.

Inventors

Hae-Seok Ji (3 patents)
Ook Jae Cho (6 patents)
Jae-Gug Ryu (3 patents)
Jong Yeol Yang (19 patents)
Young Hoon Ahn (11 patents)
Bong Suk Kim (7 patents)
Dong Hyun Kim (532 patents)

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