Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Micro-electromechanical relay

Micro-electromechanical relay

US Patent 7312678 · Granted Dec 25, 2007

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Flying sensor head2017
Position sensitive detection optimization2015
Substrate analysis using surface acoustic wave metrology2015
Articulated MEMs structures2008
Sunken electrode configuration for MEMs Micromirror2007
Electrical x-talk shield for MEMs micromirrors2007
Sunken electrode configuration for MEMs micromirror2007
Electrical x-talk shield for MEMS micromirrors2006
Piano MEMs micromirror2005
Variable dimension optical chamber and laser incorporating the same1998
Optogalvanic spectroscopy with phase independent detection1998
Fabrication of a surface micromachined capacitive microphone using a dry-etch pr1996