Apparatus for treating perfluorocompound gas

Assignee

• Hitachi

Inventors

• Shuichi Kanno (19 patents)
• Hisao Yamashita (43 patents)
• Tomohiko Miyamoto (38 patents)
• Shin Tamata (38 patents)
• Yoshiki Shibano (3 patents)
• Takeo Komuro (3 patents)
• Tsugihiro Yukitake (1 patents)
• Terufumi Kawasaki (4 patents)

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