Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pattern size correcting device and pattern size correcting method

Pattern size correcting device and pattern size correcting method

US Patent 7240307 · Granted Jul 3, 2007

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Analyzer and display method2025
Wear resistant component2025
Electrophoresis system and electrophoresis analysis method2025
Wear resistant component2025
Recording/reading apparatus, method of generating tag list for recording/reading2015
Method for producing propylene-based polymer2015
Mask pattern correction device, method of correcting mask pattern, light exposur2013
Mask pattern correction device, method of correcting mask pattern, light exposur2013
Method of inspecting mask pattern and mask pattern inspection apparatus2013
Data generation method for semiconductor device, and electron beam exposure syst2013
Recording/reading apparatus, method of generating tag list for recording/reading2013
Exposure method and method of making a semiconductor device2012