Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS membrane based sensor

MEMS membrane based sensor

US Patent 7223366 · Granted May 29, 2007

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Medical device for diagnosing pressure ulcers2022
Electrostatic speaker2018
Method and apparatus for dry gas phase chemically etching a structure2018
MEMS-released curved image sensor2017
Electrostatic speaker2016
Electrostatic speaker2015
Selective etching of semiconductor substrate(s) that preserves underlying dielec2014
MEMS device including a chip carrier2012
Medical device for diagnosing pressure ulcers2012
Proof-mass with supporting structure on integrated circuit-MEMS platform and met2012
Method of fabricating MEMS device2010
Proof-mass with supporting structure on integrated circuit-MEMS platform2010