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Home › Curved honeycomb article, EUV apparatus having a curved honeycomb article, and method of making a curved honeycomb article

Curved honeycomb article, EUV apparatus having a curved honeycomb article, and method of making a curved honeycomb article

US Patent 7189446 · Granted Mar 13, 2007

Estimated economic value: $61,208,000 ⓘ

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