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Home › Method of depositing thin film using hafnium compound

Method of depositing thin film using hafnium compound

US Patent 7163719 · Granted Jan 16, 2007

Assignee

Ips Group

Inventors

Young-Hoon Park (123 patents)
Cheol Ahn (2 patents)
Sang Jin Lee (226 patents)
Byoung Cheol Cho (2 patents)
Sang Park (1 patents)
Hong Lim (3 patents)
Sang Kyu Lee (86 patents)
Jang Bae (1 patents)

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