Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Indirectly heated cathode ion source

Indirectly heated cathode ion source

US Patent 7138768 · Granted Nov 21, 2006

Estimated economic value: $19,469,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Shadow mask apparatus and methods for variable etch depths2025
Cyclotron having continuously variable energy output2024
Modulation of rolling k vectors of angled gratings2024
Scanned angled etching apparatus and techniques providing separate co-linear rad2024
Forming variable depth structures with laser ablation2024
Spinning disk with electrostatic clamped platens for ion implantation2024
Apparatus and techniques for substrate processing using independent ion source a2024
Apparatus and techniques for angled etching using multielectrode extraction sour2024
Apparatus and system including high angle extraction optics2024
System and methods using an inline surface engineering source2024
Etch improvement2023
Ion beam source for optical device fabrication using a segmented ion source havi2023