Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Correcting variations in the intensity of light within an illumination field without distorting the telecentricity of the light

Correcting variations in the intensity of light within an illumination field without distorting the telecentricity of the light

US Patent 7119883 · Granted Oct 10, 2006

Estimated economic value: $2,735,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for measuring intensity in a lithographic alignment apparatu2025
Systems and methods for measuring intensity in a lithographic alignment apparatu2025
Vibration isolator for supporting a payload2025
Monolithic particle inspection device2025
Lithographic apparatus, metrology systems, and methods thereof2025
Self-referencing integrated alignment sensor2025
Optical designs of miniaturized overlay measurement system2024
Spectrometric metrology systems based on multimode interference and lithographic2024
On chip sensor for wafer overlay measurement2024
Lithographic apparatus, metrology systems, phased array illumination sources and2024
Feed supplement bolus with active yeast2022
Reticle sub-field thermal control2022