Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System for, method of and computer program product for detecting failure of manufacturing apparatuses

System for, method of and computer program product for detecting failure of manufacturing apparatuses

US Patent 7062409 · Granted Jun 13, 2006

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor device and method of manufacturing the same2023
Semiconductor storage device2022
Semiconductor memory device and method of manufacturing the same2021
Failure detecting method, failure detecting apparatus, and semiconductor device 2012
Linear pattern detection method and apparatus2011
Semiconductor substrate, substrate inspection method, semiconductor device manuf2011
Semiconductor substrate, substrate inspection method, semiconductor device manuf2009
Method for analyzing fail bit maps of waters and apparatus therefor2008
System and method for monitoring manufacturing apparatuses2007
System and method for identifying a manufacturing tool causing a fault2007
Method for analyzing fail bit maps of wafers2006
Failure detection system, failure detection method, and computer program product2006