Molecular pump equipped with flange having buffering portion

Assignee

• Boc Edwards Technologies Limited

Inventors

• Yoshiyuki Sakaguchi (49 patents)
• Satoshi Okudera (14 patents)
• Hirotaka Namiki (17 patents)
• Takashi Kabasawa (54 patents)
• Togru Miwata (1 patents)

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