Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom

Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom

US Patent 7046411 · Granted May 16, 2006

Estimated economic value: $12,575,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Micromachined cutting blade formed from {211}-oriented silicon2011
Microfabricated bulk wave acoustic bandgap device2010
Microfabricated bulk wave acoustic bandgap device2010
Microelectromechanical tunable inductor2010
Contour mode resonators with acoustic reflectors2008
Tensile-stressed microelectromechanical apparatus and microelectromechanical rel2008
Tensile-stressed microelectromechanical apparatus and tiltable micromirrors form2007
Microfabricated ion trap array2006
Use of a photonic crystal for optical amplifier gain control2006
Method for fabricating a photonic crystal2005
Method to fabricate layered material compositions2004
Microfabricated bragg waveguide2004