Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Micellar technology for post-etch residues

Micellar technology for post-etch residues

US Patent 7018939 · Granted Mar 28, 2006

Estimated economic value: $52,944,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pore sealing and cleaning porous low dielectric constant structures2013
Methods for removing a photoresist from a metal-comprising material2012
Method for cleaning a semiconductor structure and chemistry thereof2012
Methods for retaining metal-comprising materials using liquid chemistry dispense2012
Methods for removing a metal-comprising material from a semiconductor substrate2010