Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Micromechanical resonator device and micromechanical device utilizing same

Micromechanical resonator device and micromechanical device utilizing same

US Patent 6856217 · Granted Feb 15, 2005

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Compound spring MEMS resonators for frequency and timing generation2018
Multiple coil spring MEMS resonator2018
Vertical differential resonator2016
Temperature compensated resonator with a pair of spaced apart internal dielectri2016
ESD protection for MEMS resonator devices2016
Vertical differential resonator2014
Bias voltage tuning of MEMS resonator operation point2014
ESD protection for MEMS resonator devices2014
Resonator system such as a microresonator system and method of making same2011
Micromechanical structures having a capacitive transducer gap filled with a diel2009
High-Q micromechanical resonator devices and filters utilizing same2007
Micromechanical resonator device having a desired mode shape2006