Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Barium fluoride high repetition rate UV excimer laser

Barium fluoride high repetition rate UV excimer laser

US Patent 6839374 · Granted Jan 4, 2005

Estimated economic value: $33,339,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Coated optics to improve durability2005
Photolithographic element blank calcium strontium fluoride UV transmitting mixed2004
High repetition rate excimer laser system2004
High repetition rate UV excimer laser2004
Below 160NM optical lithography crystal materials and methods of making2003
Photolithographic method and UV transmitting fluoride crystals with minimized sp2003
Making a dispersion managing crystal2003
Divalent fluoride doped cerium fluoride scintillator1991