Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Deep UV-resistant photoresist plug for via hole

Deep UV-resistant photoresist plug for via hole

US Patent 6833233 · Granted Dec 21, 2004

Estimated economic value: $11,145,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Baffle plate for controlling wafer uniformity and methods for making the same2025
High aspect ratio bosch deep etch2025
Etching methods for integrated circuits2025
Double-sided stacked DTC structure2025
Bond pad structure coupled to multiple interconnect conductive\ structures throu2025
Semiconductor structure including source/drain regions at different levels withi2025
Boundary design for high-voltage integration on HKMG technology2025
Techniques for vertical cavity surface emitting laser oxidation2025
Semiconductor apparatus and method of collecting residues2025
Integrated chip with a gate structure disposed within a trench2025
High voltage device with gate extensions2025
Fully-wet via patterning method in piezoelectric sensor2025