Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for adjusting and expposing the second level of a phase-shift mask

Method for adjusting and expposing the second level of a phase-shift mask

US Patent 6830873 · Granted Dec 14, 2004

Estimated economic value: $152,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for adjusting a multilevel phase-shifting mask or reticle2004