Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices

Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices

US Patent 6793829 · Granted Sep 21, 2004

Estimated economic value: $7,598,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Physics package design for a cold atom primary frequency standard2011
Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices2006
Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices2006
Reduced start time for MEMS gyroscope2006
Methods and systems for simultaneously fabricating multi-frequency MEMS devices2005
Passive temperature compensation technique for MEMS devices2005
Methods and systems for decelerating proof mass movements within MEMS structures2005
Methods and systems for controlling movement within MEMS structures2005
Increasing the dynamic range of a MEMS gyroscope2005
Methods and systems for actively controlling movement within MEMS structures2004
Noise source for starting MEMS gyroscope2004
Reduced start time for MEMS gyroscope2004