Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Point-of-use fluid regulating system for use in the chemical-mechanical planarization of semiconductor wafers

Point-of-use fluid regulating system for use in the chemical-mechanical planarization of semiconductor wafers

US Patent 6764378 · Granted Jul 20, 2004

Estimated economic value: $2,873,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for actuating end effectors to condition polishing pads used2006
Point-of-use fluid regulating system for use in the chemical-mechanical planariz2003
Point-of-use fluid regulating system for use in the chemical-mechanical planariz2002