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Home › Multiple conductive plug structure including at least one conductive plug region and at least one between-conductive-plug region for lateral RF MOS devices

Multiple conductive plug structure including at least one conductive plug region and at least one between-conductive-plug region for lateral RF MOS devices

US Patent 6762456 · Granted Jul 13, 2004

Estimated economic value: $2,667,000 ⓘ

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