Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Inherently stable electrostatic actuator technique which allows for full gap deflection of the actuator

Inherently stable electrostatic actuator technique which allows for full gap deflection of the actuator

US Patent 6750659 · Granted Jun 15, 2004

Estimated economic value: $14,621,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Image sensor having a variable aperture and mono-color focal plane array for dua2010
Adjustable compensation of a piezo drive amplifier depending on mode and number 2007
Adjustable compensation of a piezo drive amplifier depending on mode and number 2004
Closed loop charge mode drive for piezo actuators using a DC restore amplifier2004
Digital control loop to solve instability of electrostatic drives beyond &frac132004
Conductive member grid array interface for mirror array drive apparatus2004
Integrated charge and voltage mode drive circuit for piezo actuators used in mas2003
Staring focal plane array architecture for multiple applications1995