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Home › CHARGE DETECTOR SEMICONDUCTOR COMPONENT, SYSTEM COMPRISING A CHARGE DETECTOR SEMICONDUCTOR COMPONENT AND A REFERENCE SEMICONDUCTOR COMPONENT, WAFER, USE OF A WAFER, AND METHOD FOR THE QUALITATIVE AND QUANTITATIVE MEASUREMENT OF CHARGING OF A WAFER

CHARGE DETECTOR SEMICONDUCTOR COMPONENT, SYSTEM COMPRISING A CHARGE DETECTOR SEMICONDUCTOR COMPONENT AND A REFERENCE SEMICONDUCTOR COMPONENT, WAFER, USE OF A WAFER, AND METHOD FOR THE QUALITATIVE AND QUANTITATIVE MEASUREMENT OF CHARGING OF A WAFER

US Patent 6747303 · Granted Jun 8, 2004

Estimated economic value: $864,000 ⓘ

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