Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and systems for reducing stick-down within MEMS structures

Methods and systems for reducing stick-down within MEMS structures

US Patent 6718825 · Granted Apr 13, 2004

Estimated economic value: $9,622,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Animal's bowl2018
Animal's bowl2017
Physics package design for a cold atom primary frequency standard2011
High resolution mass spectrometry method and system for analysis of whole protei2010
Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices2006
Reduced start time for MEMS gyroscope2006
Methods and systems for simultaneously fabricating multi-frequency MEMS devices2005
Passive temperature compensation technique for MEMS devices2005
Methods and systems for decelerating proof mass movements within MEMS structures2005
Methods and systems for controlling movement within MEMS structures2005
Increasing the dynamic range of a MEMS gyroscope2005
Methods and systems for actively controlling movement within MEMS structures2004