Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for actuation of a two-axis MEMS device using three actuation elements

Method and apparatus for actuation of a two-axis MEMS device using three actuation elements

US Patent 6717325 · Granted Apr 6, 2004

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wavefront sensor with inner detector and outer detector2024
Methods and devices for de novo oligonucleic acid assembly2023
Devices and methods for oligonucleic acid library synthesis2023
Free space optical terminal with dither based alignment2023
De novo synthesized gene libraries2023
De novo synthesized gene libraries2022
Beacon multiplexing for alignment of free space optical communication terminals2022
Feed-forward control of free space optical communication system based on inertia2022
De novo synthesized gene libraries2021
Free space optical terminal with dither based alignment2021
Functionalized surfaces and preparation thereof2021
De novo synthesized gene libraries2020