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Home › Method for characterizing the planarizing properties of an expendable material combination in a chemical-mechanical polishing process; simulation technique; and polishing technique

Method for characterizing the planarizing properties of an expendable material combination in a chemical-mechanical polishing process; simulation technique; and polishing technique

US Patent 6682398 · Granted Jan 27, 2004

Estimated economic value: $662,000 ⓘ

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