Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Controlled aging of photoresists for faster photospeed

Controlled aging of photoresists for faster photospeed

US Patent 6664023 · Granted Dec 16, 2003

Estimated economic value: $6,455,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Detection of a gaseous substance emanating from a layer of polymeric composition2002
Detection of a gaseous substance emanating from a layer of polymeric composition2001
Mask with attenuating phase-shift and opaque regions2001
Composition for eliminating microbridging in chemically amplified photoresists c1996