Assignee
Inventors
- Wayne Spevak (66 patents)
- Songyuan Shi (35 patents)
- Prasad Manchem (7 patents)
- Michael R. Kozlowski (15 patents)
- Steven R. Schow (37 patents)
- Robert T. Lum (20 patents)
- Louise Robinson (14 patents)
- Jeong Weon Park (1 patents)
US Patent 6653321 · Granted Nov 25, 2003