Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof

Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof

US Patent 6614923 · Granted Sep 2, 2003

Estimated economic value: $213,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Traffic safety support system2025
Ambulance service support device, ambulance service support method, and program 2025
Traffic safety support system and learning method executable by the same2025
Traffic safety support system2025
RF sputtering of multiple electrodes with optimized plasma coupling through the 2025
Information processing apparatus, information processing method, and program for2025
Traffic safety support system2025
Traffic safety support system2025
Traffic safety support system2025
Signal processing device, imaging device, and signal processing method2025
Electromagnetic wave shield film2025
Spectrometry apparatus2025