Abrasive article having a window system for polishing wafers, and methods

Assignee

• 3M

Inventors

• Michael J. Muilenburg (3 patents)
• Chong-Yong Kim (5 patents)
• Jerry Fizel (2 patents)
• Richard J. Webb (13 patents)
• John J. Gagliardi (41 patents)
• Daniel B. Pendergrass, Jr. (21 patents)
• Robert J. Streifel (3 patents)
• Wesley J. Bruxvoort (14 patents)

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