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Home › Regeneration of plating baths and system therefore

Regeneration of plating baths and system therefore

US Patent 6596148 · Granted Jul 22, 2003

Estimated economic value: $8,764,000 ⓘ

Assignee

Mykrolis

Inventors

Brett Belongia (14 patents)
Zhen Wu Lin (4 patents)
John E. Pillion (11 patents)
Jieh-Hwa Shyu (26 patents)

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