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Home › System and method for modifying enclosed areas for ion beam and laser beam bias effects

System and method for modifying enclosed areas for ion beam and laser beam bias effects

US Patent 6591154 · Granted Jul 8, 2003

Estimated economic value: $17,066,000 ⓘ

Assignee

IBM

Inventors

Richard A. Haight (75 patents)
Peter Longo (20 patents)
Alfred Wagner (63 patents)

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