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Home › First stage salicidation of cobalt during cobalt deposition or subsequent Ti or Tin cap deposition using energy from a directional plasma

First stage salicidation of cobalt during cobalt deposition or subsequent Ti or Tin cap deposition using energy from a directional plasma

US Patent 6582568 · Granted Jun 24, 2003

Estimated economic value: $6,366,000 ⓘ

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